Pattern Dependency of Pure-Boron-Layer Chemical-Vapor Depositions
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چکیده
منابع مشابه
Synthesis of few-layer hexagonal boron nitride thin film by chemical vapor deposition.
In this contribution we demonstrate a method of synthesizing a hexagonal boron nitride (h-BN) thin film by ambient pressure chemical vapor deposition on polycrystalline Ni films. Depending on the growth conditions, the thickness of the obtained h-BN film is between ∼5 and 50 nm. The h-BN grows continuously on the entire Ni surface and the region with uniform thickness can be up to 20 μm in late...
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ژورنال
عنوان ژورنال: ECS Transactions
سال: 2012
ISSN: 1938-6737,1938-5862
DOI: 10.1149/1.3700937